Abstract. This work presents a system to increase the yield of a novel 3-D chip integration technology. A built-in self-test and a routing system have been developed to identify and avoid faults on vertical connections between different stacked chips. The 3-D technology is based on stacking several active CMOS-ICs, which have through-substrate electrical contacts to communicate with each other. The expected defects of these vias are shorts and resistances that are too high.

The test and routing system is designed to analyze an arbitrary number of connections. The result ist used to gain information about the reliability of the new 3-D processing and to increase its yield. The circuits have been developed in 0.13 μm technology, one chip has been fabricated and tested, another one is in production.